Aktuelle Publikation
Tip‑ and Laser‑based 3D Nanofabrication in Extended Macroscopic Working Areas
Ingo Ortlepp1. Thomas Fröhlich1. Roland Füßl et al.1.
Nanomanufacturing and Metrology 4, 132–148 (2021). DOI: doi.org/10.1007/s41871-021-00110-w
1Institute of Process Measurement and Sensor Technology, Technische Universität Ilmenau, Ehrenbergstrasse 29, 98693, Ilmenau, Germany.