Current Publication
Stress Controlled Piezoeletric ALN-MEMS-Resonators with Molybdenum Electrodes for GHz Applications
H. Mehner1.
K. Brueckner1.
D. Karolewski2.
S. Michael2.
M. A. Hein1.
M. Hoffmann1.
23rd Micromechanics and Microsystems Europe Workshop (MME), 2012, in Proceedings, Session C.06, online: www.tu-ilmenau.de/fileadmin/media/mme2012/Proceedings/Session_C/C06_1642_MME2012_120622.pdf
1Institute of Micro- and Nanotechnologies MacroNano®, University of Technology Ilmenau, Germany.
2IMMS Institut für Mikroelektronik- und Mechatronik-Systeme gemeinnützige GmbH, Ilmenau.
Article
