IMMS - Schematic-Based Design of MEMS for Applications in Optics and Robotics

Current Publication

Schematic-Based Design of MEMS for Applications in Optics and Robotics

T. Maier¹. D. Meisel¹. Volker Boos³. Ralf Popp².

edaWorkshop, Dresden, 14.05.2013-16.05.2013

¹Robert Bosch GmbH, Stuttgart. ²edacentrum GmbH, Hannover. ³IMMS Institut für Mikroelektronik- und Mechatronik-Systeme gemeinnützige GmbH, Ilmenau.

Poster presentation

Related content

Project

MEMS2015

The IMMS tool automatically generates mechanical designs. MEMS can be simulated and verified as an entire system.

Award

Best Paper Award Runner-Up für den Beitrag: Systematic MEMS ASIC Design Flow using the Example of an Acceleration Sensor

Jenny Klaus

Research

Imprint/Disclaimer

Privacy statement

Search

Home

Lead applications

Career

Social Media