Current Publication
Planar Magnetic 6D Levitating system with Compact Sensor
Christoph Schäffel1.
Michael Katzschmann1.
Hans-Ulrich Mohr1.
Rainer Glöß2.
Christian Rudolf2.
Christopher Mock2.
Carolin Walenda2.
R. Liang2.
27th Annual Meeting of the American Society for Precision Engineering (ASPE), 2012, in Proceedings, ISBN 978-1-887706-61-2, p. 99-102
1IMMS Institut für Mikroelektronik- und Mechatronik-Systeme gemeinnützige GmbH, Ilmenau.
2Physik Instrumente (PI) GmbH & Co. KG, Karlsruhe, Germany.
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Project
Mag6D
Within the project a novel planar drive system was developed which is magnetically guided and moves objects with nanometer precision.
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