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Current Publication

Physical Design and Verification of MEMS, RoMulus – Robuste Multisensorik zur Zustandsüberwachung in Industrie-4.0-Anwendungen

Volker Boos1, Jenny Klaus2, Gerold Schröpfer3, Johannes Eisenmenger4, Johannes Seelhorst5
edaWorkshop 2017, , Dresden
1X-FAB Semiconductor Foundries AG, Haarbergstraße 67, 99097 Erfurt, Germany, 2IMMS Institut für Mikroelekronik- und Mechatronik-Systeme gemeinnützige GmbH (IMMS GmbH), Ehrenbergstraße 27, 98693 Ilmenau, Germany, 3Conventor, 4Carl Zeiss SMT GmbH, Rudolf-Eber-Straße 2, 73447 Oberkochen, Germany, 5Robert Bosch GmbH, Germany

Related content

Project

RoMulus

Systematic design and economical manufacture for intelligent multi-sensor systems in small quantities

Award

iENA silver medal for “Circuit configuration to provide the charging energy for a level change on a signal bus, method for the calibration and signal transmission system”

Georg Gläser

Award

Best Paper Award Runner-Up für den Beitrag: Systematic MEMS ASIC Design Flow using the Example of an Acceleration Sensor

Jenny Klaus

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