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Current Publication

Physical Design and Verification of MEMS, RoMulus – Robuste Multisensorik zur Zustandsüberwachung in Industrie-4.0-Anwendungen

Volker Boos1. Jenny Klaus1. Gerold Schröpfer3. Johannes Eisenmenger4. Johannes Seelhorst5.

edaWorkshop 2017, 8-10 May 2017, Dresden

1X-FAB Semiconductor Foundries AG, Germany, Erfurt. 2IMMS Institut für Mikroelektronik- und Mechatronik-Systeme gemeinnützige GmbH, 98693 Ilmenau, Germany. 3Coventor. 4Carl Zeiss SMT GmbH, Germany. 5Robert Bosch, Germany.

Related content

Project

RoMulus

Systematic design and economical manufacture for intelligent multi-sensor systems in small quantities

Award

iENA silver medal for “Circuit configuration to provide the charging energy for a level change on a signal bus, method for the calibration and signal transmission system”

Georg Gläser

Award

Best Paper Award Runner-Up für den Beitrag: Systematic MEMS ASIC Design Flow using the Example of an Acceleration Sensor

Jenny Klaus

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