Current Publication
Perforated plates of inertial sensors – modeling by effective material properties
Steffen Michael1.
Astrid Frank1.
G. Hölzer2.
G. Lorenz3.
EUROSENSORS 2014, the 28th European Conference on Solid-State Transducers, in Procedia Engineering, Volume 87, 2014, Pages 480 – 483, www.sciencedirect.com, DOI: dx.doi.org/10.1016/j.proeng.2014.11.400
1IMMS Institut für Mikroelektronik- und Mechatronik-Systeme gemeinnützige GmbH, D-98693 Ilmenau, Germany.
2XFAB-AG, Germany, Erfurt.
3Conventor, 3 avenue de Quebec, 91140 Villebon sur Yvette, France.