Aktuelle Publikation
Perforated plates of inertial sensors – modeling by effective material properties
Steffen Michael1, Astrid Frank1, G. Hölzer2, G. Lorenz3
in Procedia Engineering, EUROSENSORS 2014, the 28th European Conference on Solid-State Transducers, vol. 87, pp. 480–483, 2014, DOI: dx.doi.org/10.1016/j.proeng.2014.11.400
1IMMS Institut für Mikroelekronik- und Mechatronik-Systeme gemeinnützige GmbH (IMMS GmbH), Ehrenbergstraße 27, 98693 Ilmenau, Germany, 2X-FAB Semiconductor Foundries AG, Haarbergstraße 67, 99097 Erfurt, Germany, 3Conventor, 3 avenue de Quebec, 91140 Villebon sur Yvette, France