Nanopositioning and fabrication using the Nano Fabrication Machine with a positioning range up to ⊘100 mm

Jaqueline Stauffenberg¹. Christoph Reuter¹. Ingo Ortlepp¹. Mathias Holz². Denis Dontsov³. Christoph Schäffel⁴. Jens-Peter Zöllner¹. Ivo Rangelow¹. Steffen Strehle¹. Eberhard Manske¹.

Proc. SPIE 11610, Novel Patterning Technologies 2021, 1161016 (22 February 2021); DOI: doi.org/10.1117/12.2583703

¹Technische Universität Ilmenau, Germany. ²nano analytik GmbH, Germany. ³SIOS Meßtechnik GmbH, Germany. ⁴IMMS Institut für Mikroelektronik- und Mechatronik-Systeme gemeinnützige GmbH, 98693 Ilmenau, Germany.

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Nanopositioning and fabrication using the Nano Fabrication Machine with a positioning range up to ⊘100 mm

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