Current Publication
Micromechanical, vertical comb-drive-structures for the construction of an electrostatic energy harvester
Stefan Hampl1,2.
Bianca Leistritz1.
Benjamin Saft1.
Eckhard Hennig1.
Martin Hoffmann2.
Energy self-sufficient Sensors, 2014, 7th GMM-Workshop - Proceedings of , Pages 14 – 19, Print ISBN: 978-3-8007-3581-5, VDE Verlag GmbH
1IMMS Institut für Mikroelektronik- und Mechatronik-Systeme gemeinnützige GmbH, Germany, Ilmenau.
2Technische Universität Ilmenau, IMN MacroNano®, Fachgebiet Mikromechanische Systeme, Germany, Ilmenau.
Related content
Project
GreenSense
For bio-analysis IMMS developed energy-efficient multi-parametric RFID microsensors and energy harvesting modules for operating autonomous sensors.