Current Publication
Manufacturing System for ultraprecision polishing of light curved optical parts
Autorenkollektiv.
Ch. Schäffel2.
Micro Technology and Measurement Techniques and Equipment Eurogress, Aachen, Germany, International Topical Conference on Precision Engineering, 19th May 2003
2IMMS Institut für Mikroelektronik- und Mechatronik-Systeme gemeinnützige GmbH, Ilmenau.
Talk
Research
- Integrated sensor systems
- Smart distributed measurement and test systems
- Magnetic 6D direct drives with nm precision
Imprint/Disclaimer
Privacy statement
Search
Home
Lead applications
- Sensor systems for in-vitro diagnostics
- RFID sensor technology
- Adaptive edge AI systems for industrial application
- IoT systems for cooperative environmental monitoring
- nm measurement and structuring of objects
- Target markets
Career
- Vacancies and application process
- Doctorates
- Internships, jobs, BSc/MSc subjects
- Vocational Training
- Questions and answers
Social Media
Services for research and development
- Integrated Circuits
- IC design methods
- Test and characterisation
- Development of embedded systems
- Development of mechatronic systems
- MEMS – simulation, design and test
- Finite Element Modeling
About us
Research
- Integrated sensor systems
- Smart distributed measurement and test systems
- Magnetic 6D direct drives with nm precision
Imprint/Disclaimer
Privacy statement
Search
Home
Lead applications
- Sensor systems for in-vitro diagnostics
- RFID sensor technology
- Adaptive edge AI systems for industrial application
- IoT systems for cooperative environmental monitoring
- nm measurement and structuring of objects
- Target markets
Career
- Vacancies and application process
- Doctorates
- Internships, jobs, BSc/MSc subjects
- Vocational Training
- Questions and answers
Social Media
Services for research and development
- Integrated Circuits
- IC design methods
- Test and characterisation
- Development of embedded systems
- Development of mechatronic systems
- MEMS – simulation, design and test
- Finite Element Modeling
About us