Hybrid Characterization and Reconstruction of Transient Thermal Fields in 6-DOF Nanopositioning Systems

Parastoo Salimitari¹. Ina Naujokat¹. Ahmed Rahat¹. Amin Suaad¹. Ludwig Herzog¹. Tino Hutschenreuther¹.

2026 PI Symposium on Mechatronics System Design, June 16-17, 2026, Karlsruhe, Germany

¹IMMS Institut für Mikroelektronik- und Mechatronik-Systeme gemeinnützige GmbH (IMMS GmbH), Ehrenbergstraße 27, 98693 Ilmenau, Germany..

Magnetic 6D-direct drives with nanometre precision Smart distributed measurement and test systems Talk and poster presentation

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