Experimental characterization of thermal disturbances in a 6DOF nanopositioning system under varying operational conditions

Parastoo Salimitari¹. Steffen Hesse¹. Michael Katzschmann¹. Luwig Herzog¹.

Euspen Special Interest Conference: Precision & Performance 2025, November 18-20, 2025, Cranfield University, United Kingdom

¹IMMS Institut für Mikroelektronik- und Mechatronik-Systeme gemeinnützige GmbH, Ehrenbergstraße 27, 98693 Ilmenau, Germany.

Magnetic 6D-direct drives with nanometre precision Smart distributed measurement and test systems Reviewed scientific article

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