Current Publication
Electrostatic parallel-plate MEMS-Switch on Silicon-Ceramic-Composite-Substrates
Sebastian Gropp1.
Astrid Frank2.
Christoph Schäffel2.
Matthias Hoffmann1.
Microwave Conference (GeMiC), 2015 German , 16-18 March 2015, Page(s) 414 - 417, DOI: dx.doi.org/10.1109/GEMIC.2015.7107841
1Technische Universität Ilmenau, IMN MacroNano®, Germany.
2IMMS Institut für Mikroelektronik- und Mechatronik-Systeme gemeinnützige GmbH, D-98693 Ilmenau, Germany.
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Project
MUSIK
IMMS has investigated, modelled and validated MEMS characteristics to develop basic blocks for a universally applicable method for MEMS design.
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