Current Publication
Electrostatic parallel-plate MEMS-Switch on Silicon-Ceramic-Composite-Substrates
Sebastian Gropp1, Astrid Frank2, Christoph Schäffel2, Martin Hoffmann1
2015 German Microwave Conference, , Nuremberg, Germany, pp. 414-417, DOI: dx.doi.org/10.1109/GEMIC.2015.7107841
1Technical University of Ilmenau, Institute for Micro- and Nanotechnologies (IMN) MacroNano®, 98684 Ilmenau, P.O. Box 10 05 65, Germany, 2IMMS Institut für Mikroelekronik- und Mechatronik-Systeme gemeinnützige GmbH (IMMS GmbH), Ehrenbergstraße 27, 98693 Ilmenau, Germany
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MUSIK
IMMS has investigated, modelled and validated MEMS characteristics to develop basic blocks for a universally applicable method for MEMS design.
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