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Current Publication

Efficient Design and Layout of Capacitive 3D Accelerometer

Steffen Michael1, Ralf Sommer1,2
2019 16th International Conference on Synthesis, Modeling, Analysis and Simulation Methods and Applications to Circuit Design (SMACD), , Lausanne, Switzerland, pp. 225-228, DOI: doi.org/10.1109/SMACD.2019.8795280
1IMMS Institut für Mikroelekronik- und Mechatronik-Systeme gemeinnützige GmbH (IMMS GmbH), Ehrenbergstraße 27, 98693 Ilmenau, Germany, 2Technische Universität Ilmenau, Fakultät Elektrotechnik und Informationstechnik, Fachgebiet Elektronische Schaltungen und Systeme, 98684 Ilmenau, P.O. Box 10 05 65, Germany

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