Current Publication
Efficient Design and Layout of Capacitive 3D Accelerometer
Steffen Michael1.
Ralf Sommer1.
2019 16th International Conference on Synthesis, Modeling, Analysis and Simulation Methods and Applications to Circuit Design (SMACD), Lausanne, Switzerland, 15 - 18 July 2019, pp. 225-228.
1IMMS Institut für Mikroelektronik- und Mechatronik-Systeme gemeinnützige GmbH, 98693 Ilmenau, Germany.