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Current Publication

Efficient Design and Layout of Capacitive 3D Accelerometer

Steffen Michael1. Ralf Sommer1.

2019 16th International Conference on Synthesis, Modeling, Analysis and Simulation Methods and Applications to Circuit Design (SMACD), Lausanne, Switzerland, 15 - 18 July 2019, pp. 225-228.

DOI: doi.org/10.1109/SMACD.2019.8795280

1IMMS Institut für Mikroelektronik- und Mechatronik-Systeme gemeinnützige GmbH, 98693 Ilmenau, Germany.

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Systematic design and economical manufacture for intelligent multi-sensor systems in small quantities

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Georg Gläser

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