Challenges of Building AI-Based Virtual Temperature Sensors for Nanopositioning Systems (NPS)

Amin Suaad¹, Silvia Krug^1,2, Tino Hutschenreuther¹

2026 IEEE Symposium on Artificial Intelligence for Instrumentation and Measurement (AI4IM), 21 May 2026 – 23 May 2026, Amalfi, Italy, pp. 1-6, DOI: doi.org/10.1109/AI4IM69129.2026.11558222

¹IMMS Institut für Mikroelekronik- und Mechatronik-Systeme gemeinnützige GmbH (IMMS GmbH), Ehrenbergstraße 27, 98693 Ilmenau, Germany, ²Mid Sweden University, Department of Computer and Electrical Engineering, Holmgatan 10, 851 70 Sundsvall, Sweden

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