Challenges of Building AI-Based Virtual Temperature Sensors for Nanopositioning Systems (NPS)

Amin Suaad¹. Silvia Krug^{1, 2}. Tino Hutschenreuther¹.

IEEE AI4IM 2026, IEEE Symposium on Artificial Intelligence for Instrumentation and Measurement, Mai 21-23, 2026, Amalfi, Italy

¹IMMS Institut für Mikroelektronik- und Mechatronik-Systeme gemeinnützige GmbH (IMMS GmbH), Ehrenbergstraße 27, 98693 Ilmenau, Germany. ²Department of Computer and Electrical Engineering, Mid Sweden University, Holmgatan 10, 851 70 Sundsvall, Sweden.

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