IMMS - A contribution towards model-based design of application-specific MEMS

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A contribution towards model-based design of application-specific MEMS

Jenny Klaus¹, Eric Schäfer¹, Roman Paris¹, Astrid Frank¹, Ralf Sommer¹

in Integration, vol. 58, pp. 454-462, 2017, DOI: doi.org/10.1016/j.vlsi.2017.03.014

¹IMMS Institut für Mikroelekronik- und Mechatronik-Systeme gemeinnützige GmbH (IMMS GmbH), Ehrenbergstraße 27, 98693 Ilmenau, Germany

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RoMulus

Systematic design and economical manufacture for intelligent multi-sensor systems in small quantities

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MUSIK

IMMS has investigated, modelled and validated MEMS characteristics to develop basic blocks for a universally applicable method for MEMS design.

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iENA silver medal for “Circuit configuration to provide the charging energy for a level change on a signal bus, method for the calibration and signal transmission system”

Georg Gläser

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Best Paper Award Runner-Up für den Beitrag: Systematic MEMS ASIC Design Flow using the Example of an Acceleration Sensor

Jenny Klaus

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