Current Publication
A contribution towards model-based design of application-specific MEMS
Jenny Klaus1.
Eric Schäfer1.
Roman Paris1.
Astrid Frank1.
Ralf Sommer1.
In Integration, the VLSI Journal, Volume 58, 2017, Pages 454-462, ISSN 0167-9260, DOI: doi.org/10.1016/j.vlsi.2017.03.014
1IMMS Institut für Mikroelektronik- und Mechatronik-Systeme gemeinnützige GmbH, 98693 Ilmenau, Germany.
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