TuZ 2022
Messumgebung zur mixed-signal Echtzeit-Parametererfassung bei Lebensdauertests Measuring (environment for mixed-signal real-time parameter acquisition during durability tests)
Michael Meister(IMMS), Björn Bieske (IMMS), Ingo Gryl (IMMS), Dagmar Kirsten (X-FAB Global Services GmbH)
Abstract:
With the measurement technology presented, components can be individually stressed and their states can be documented during the entire test phase via continuous monitoring. Causes of failure can thus be analysed better and more specifically. Characterisation and marketing of semiconductor circuits and their technological manufacturing processes can be improved with the new environment.
The test environment was developed for HTOL (High-Temperature Operating Life Test) investigations on reliability and life time. It is modular and enables time- or cycle-based tests at up to 175 °C on up to 128 components simultaneously. These are not controlled in parallel with identical patterns, but an individual test sequence is generated for each individual component, during which digital and analogue parameters can be continuously observed.
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