ISPS 2018
Lecture: Thick Copper Re-Distribution Layer for Integrated High Voltage Transistors
Authors: Ralf Lerner1, Klaus Heinrich1, Marco Erstling1, Peter Kornetzky2
1X-FAB Semiconductor Foundries GmbH, Erfurt, Germany
2IMMS Institut für Mikroelektronik- und Mechatronik-Systeme gemeinnützige GmbH, Ehrenbergstraße 27, 98693 Ilmenau, Germany
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