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ISPS 2018

Date, Type of contribution, Location:
,Talk,Prague, CZ
Event:
Further information:

Lecture: Thick Copper Re-Distribution Layer for Integrated High Voltage Transistors

Authors: Ralf Lerner1, Klaus Heinrich1, Marco Erstling1, Peter Kornetzky2

 

1X-FAB Semiconductor Foundries GmbH, Erfurt, Germany

2IMMS Institut für Mikroelektronik- und Mechatronik-Systeme gemeinnützige GmbH, Ehrenbergstraße 27, 98693 Ilmenau, Germany

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