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IFAC 2019

Date, Type of contribution, Location:
06.09.2019,Lectures,Vienna, Austria
Contribution to the Invited Session ”Precision scanning systems in metrology and manufacturing“


Integrated Planar 6-DOF Nanopositioning System

S. Gorges1, S. Hesse1, C. Schäffel1, I. Ortlepp2, E. Manske2, E. Langlotz3, D. Dontsov3.

  • 1IMMS GmbH
  • 2Technische Universität Ilmenau
  • 3SIOS Meßtechnik GmbH

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