Annual Report 2011
r A n n u a o p e rt 2 0 1 l IMMS I Annual Report 2011 I Future is now. 1 1 Imprint Publisher Institute for Microelectronic and Mechatronic Systems GmbH Ehrenbergstraße 27 D-98693 Ilmenau Tel. : +49.3677.6955.00 Fax : +49.3677.6955.15 E-Mail: imms@imms.de www: http://www.imms.de Editing and Proof Reading Prof. Dr.-Ing. Ralf Sommer Dipl.-Ing. Hans-Joachim Kelm Dipl.-Hdl. Dipl.-Des. Beate Hövelmans Dipl.-Ing. Anne Arlt Translation Claudia Koch Layout and Typesetting Manuel Mohr Dipl.-Hdl. Dipl.-Des. Beate Hövelmans Photos Dipl.-Hdl. Dipl.-Des. Beate…
2010 Jahresbericht | Fachartikel SMARTIEHS (en/de)
15 Optimized Test of MEMS Hence, as an example, the whole conception of the nic control system on a substratum respectively on The fabrication processes of MEMS require a se- the components of the project partners. Another a chip. Mostly their size is only a few micrometers quence of test steps for the monitoring of quality subtask is the development of the regulation of the (example see figure 1). These tiny systems have un- and for the safeguarding of performance parame- scanning unit. But IMMS brings in already existing …
2010 Jahresbericht | Fachartikel SFB622 (en/de)
15 3D POSITIONING SYSTEM IN THE RANGE OF NANOMETERS Collaborative Research Center 622 “NanoPositioning and NanoMeasuring Machines” IMMS had collaborated, in the part project A5, consiso, it is the aim of the operation of IMMS, to research Planar Air-guided Direct Drive System forces. The x-, y-position of the slider as well as the Minimization of Disturbances the basics of designing nanopositioning systems for A planar aerostatically guided direct drive system, rotation r z are measured by high-resolution plane Regarding absolute…
2010 Jahresbericht | Fachartikel Lichtsensoren (en/de)
15 all sensory input we use for orienting ourselves in our Photodiodes in Electronic Devices environment and for communicating with other hu- Light-based electronic sensors and communication man beings is received visually. Through our eyes, we systems require both light-emitting components, can sense the spatial distribution and temporal vari- such as LEDs or displays, as well as devices called ations of the intensity and color of the ambient light. photodiodes, which are capable of converting light From this stream of…
2010 Jahresbericht | Fachartikel Ambient Light Sensor (en/de)
By means of the ambient light sensor D3010A, an innovative circuit has been developed, which shows Multitude of Applications at the same time, how circuit development can be The ambient light sensor can be applied wherever realized by IMMS from the idea up to the sample. The visibility conditions must be adapted to the human ambient light sensor (ALS) permits, like shown in fi- eye. In figure 2 you can see exemplarily a laptop and gure 1, to detect and evaluate the brightness of the a cell-phone. In terms of such…
2009 Jahresbericht | Fachartikel PMS380 (en/de)
LASER DICING TECHNOLOGY FOR THIN SEMICONDUCTOR WAFERS PLANAR PRECISION DRIVE FOR 12 INCH WAFER DICING „As a result of competent and creative collaboration, at the end of 2009, the company ALSI was able to take the first prototype of its new 12 inch laser dicing platform into operation. The achieved extreme precision, reproducibility and productivity of the laser dicing technology are at the forefront of international excellence. This is significantly boosted by the planar drive system developed by the IMMS. The close cooperation with the…
