Current Publication
Reducing the positioning uncertainty of a linear direct drive system with 200 mm travel range
		
		   St. Hesse1.                     
		  
		
			T. Maass1. 
                  
		
			Ch. Schäffel1. 
                  
		
			M. Katzschmann1.    
                  
		
		
		
		
		
		
		
Proceedings of the 7th Euspen - European Society for Precision Engineering - International Conference, 20.-24. Mai 2007, Bremen
1IMMS Institut für Mikroelektronik- und Mechatronik-Systeme gemeinnützige GmbH, Ilmenau.
			
			  
			
			
			
			
			
			
			
			
		
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