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Current Publication

Planar Motion System for a Nanopositioning- and Nanomeasuring Machine (NPMM, NMM) with 200x200m² operating range

St. Hesse1. H.-U. Mohr1. Ch. Schäffel1.

4th EUSPEN International Conference and 6th Annual General Meeting, Glasgow, 30.05-03.06.2004

1IMMS Institut für Mikroelektronik- und Mechatronik-Systeme gemeinnützige GmbH, Ilmenau.
Poster presentation