Current Publication
From Tracking Error to Accuracy – Error Budgeting and Compensation Approaches in Long-Range Nanopositioning Systems
Ludwig Herzog1
2026 PI Symposium on Mechatronics System Design, , Karlsruhe, Germany, DOI: doi.org/10.5281/zenodo.21281302
1IMMS Institut für Mikroelekronik- und Mechatronik-Systeme gemeinnützige GmbH (IMMS GmbH), Ehrenbergstraße 27, 98693 Ilmenau, Germany
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- Integrated sensor systems
- Smart distributed measurement and test systems
- Magnetic 6D direct drives with nm precision
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About us
Research
- Integrated sensor systems
- Smart distributed measurement and test systems
- Magnetic 6D direct drives with nm precision
Imprint/Disclaimer
Privacy statement
Search
Home
Lead applications
- Sensor systems for in-vitro diagnostics
- RFID sensor technology
- Adaptive edge AI systems for industrial application
- IoT systems for cooperative environmental monitoring
- nm measurement and structuring of objects
- Target markets
Career
- Vacancies and application process
- Doctorates
- Internships, jobs, BSc/MSc subjects
- Vocational Training
- Questions and answers
Social Media
Services for research and development
- Integrated Circuits
- IC design methods
- Test and characterisation
- Development of embedded systems
- Development of mechatronic systems
- MEMS – simulation, design and test
- Finite Element Modeling
About us