Current Publication
Experimental investigation of air bearing noise by means of a 3D nanopositioning system
Parastoo Salimitari1.
Steffen Hesse1.
Michael Katzschmann1.
Alex S. Huaman1.
Ludwig Herzog1.
Special Interest Conference: Precision Motion Systems and Control, Brabanthallen’s-Hertogenbosch, Netherlands, November 12-13, 2024
1IMMS Institut für Mikroelektronik- und Mechatronik-Systeme gemeinnützige GmbH, Ehrenbergstraße 27, 98693 Ilmenau, Germany.