Current Publication
Design of an interferometric test station for parallel inspection of MEMS
C. Schäffel1.
S. Michael1.
R. Paris1.
A. Frank1.
N. Zeike1.
K. Gastinger2.
M. Kujawinska3.
U. Zeitner4.
S. Beer5.
Ilmenau: 56. IWK der TU Ilmenau. 12.09. - 16.09.2011
1IMMS Institut für Mikroelektronik- und Mechatronik Systeme gemeinnützige GmbH, Ehrenbergstr. 27, D-98693 Ilmenau, Germany.
2NTNU Trondheim, before SINTEF IKT Optical measurement systems and data analysis, N-7465 Trondheim, Norway.
3Institute of Micromechanics and Photonics, Warsaw University of Technology, 8 Sw. A. Boboli St.,Pl-02-525 Warsaw, Poland.
4Fraunhofer IOF, A.-Einstein-Str. 7, 07745 Jena, Germany.
5CSEM Centre Suisse d’Electronique et de Microtechnique SA, Technoparkstr. 1, CH-8005 Zurich, Switzerland.
Talk