Current Publication
Characterizing Dynamics of MEMS Devices on Wafer Level Using Optical Measurement Techniques
Sebastian Giessmann1, Steffen Michael2, Eric Lawrence3, Heinrich Steger4
Commercial Micro Manufacturing International Magazine (CMM Magazine), 08-2023, 2023, VOL 16, NO. 3, pp. 30-39
1MPI Corporation, 2IMMS Institut für Mikroelekronik- und Mechatronik-Systeme gemeinnützige GmbH (IMMS GmbH), Ehrenbergstraße 27, 98693 Ilmenau, Germany, 3Polytec, Inc., 4Polytec GmbH, Polytec-Platz 1-7, 76337 Waldbronn, Germany