Current Publication
An interferometric test station for massive parallel inspection of passive and active M(O)EMS
M. Kujawinska2.
K. Gastinger1.
M. Jozwik2.
K. Haugholt1.
C. Schäffel3.
S. Beer4.
3rd Topical Meeting on Optical Microsystems, 27-30.09.2009, Capri
1SINTEF, Norway.
2Warsaw Univ. of Technology, Poland.
3IMMS Institut für Mikroelektronik- und Mechatronik-Systeme gemeinnützige GmbH, Ilmenau.
4Ctr. Suisse d'Electronique et de Microtechnique SA, Switzerland.
Talk