WID 2025
A method for dynamic interferometric characterization of air bearings for nanopositioning stages
Steffen Hesse, Michael Katzschmann, Alex Huaman, Parastoo Salimitari, Ludwig Herzog
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Service for R&D
Development of mechatronic systems
We develop actuator systems and open- and closed-loop controls as embedded solutions according to customer specifications with highest demands on precision, dynamics, available space, performance and efficiency.
Research field
Magnetic 6D direct drives with nm precision
To enable the manufacturing of macroscopic high-tech products with microscopic precision, we are researching scientific principles and technical solutions for nanopositioning systems for large motion ranges.
Lead application
nm measurement and structuring of objects
To be able to manufacture the ever-increasing complexity of integrated systems on ever-smaller semiconductor surfaces, for example, we are researching ever more precise drives for the nanometre measurement and structuring of objects.
Contact
Contact
Dipl.-Hdl. Dipl.-Des. Beate Hövelmans
Head of Corporate Communications
beate.hoevelmans(at)imms.de+49 (0) 3677 874 93 13
Beate Hövelmans is responsible for the text and image editorial work on this website, for the social media presence of IMMS on LinkedIn and YouTube, the annual reports, for press and media relations with regional and specialist media and other communication formats. She provides texts, photographs and video material for your reporting on IMMS, arranges contacts for interviews and is the contact person for events.