Precision Fair & euspen SIC

Date, Type of contribution, Location:

13 November 2024–14 November 2024,Trade fairsTalk,'s-Hertogenbosch, The Netherlands

Title:

1) Experimental investigation of air bearing noise by means of a 3D nanopositioning system

2) Disturbance rejection in periodic motion with enhanced constant velocity transitions using a tilt-mirror test setup

3) NPS6D200 - Realization of high precision long stroke vertical actuation in conjunction with a planar direct drive

Authors:

1) Steffen Hesse

2) Alex S. Huaman, Michael Katzschmann, Steffen Hesse, Ludwig Herzog

3) Steffen Hesse, Michael Katzschmann, Alex S. Huaman, Davi A. Brasil, Ludwig Herzog

Event:

Precision Fair and euspen Special Interest Conference: Precision Motion Systems & Control

Further information:

IMMS will be exhibiting at the LEG joint booth and will give a talk and present two posters at the euspen Special Interest Conference: Precision Motion Systems & Control.

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Service for R&D

Development of mechatronic systems

We develop actuator systems and open- and closed-loop controls as embedded solutions according to customer specifications with highest demands on precision, dynamics, available space, performance and efficiency.

Research field

Magnetic 6D direct drives with nm precision

To enable the manufacturing of macroscopic high-tech products with microscopic precision, we are researching scientific principles and technical solutions for nanopositioning systems for large motion ranges.

High-precision drive systems with spatial (6D) positioning accuracies in the single-digit nm range.

Lead application

nm measurement and structuring of objects

To be able to manufacture the ever-increasing complexity of integrated systems on ever-smaller semiconductor surfaces, for example, we are researching ever more precise drives for the nanometre measurement and structuring of objects.

Contact

Dipl.-Hdl. Dipl.-Des. Beate Hövelmans

Head of Corporate Communications

beate.hoevelmans(at)imms.de+49 (0) 3677 874 93 13

Beate Hövelmans is responsible for the text and image editorial work on this website, for the social media presence of IMMS on LinkedIn and YouTube, the annual reports, for press and media relations with regional and specialist media and other communication formats. She provides texts, photographs and video material for your reporting on IMMS, arranges contacts for interviews and is the contact person for events.

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