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  169. A contribution towards model-based design of application-specific MEMS   Jenny Klaus, Eric Schäfer Roman Paris Astrid Frank Ralf Sommer In Integration, the VLSI Journal, Volume 58, 2017, Pages 454-462, ISSN 0167-9260, DOI: https://doi.org/10.1016/j.vlsi.2017.03.014  

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