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1511.
Nonlinear vibration energy generators with mechanical stoppers for low-frequency boardband applications
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1516.
NPS6D100-A 6D Nanopositioning System with Sub-10 nm Performance in a Ø100 mm × 10 mm Workspace
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1518.
NPS6D200 – Realization of high precision long stroke vertical actuation in conjunction with a planar direct drive