Aktuelle Publikation
Nanopositioning and nanomeasuring technology - following the challenges of nanofabrication
Eberhard Manske1, Tino Hausotte1, Roland Füßl1, Thomas Fröhlich1, Martin Hofmann1, Ivo W Rangelow1, Johann Reger1, Christoph Schäffel2, Stefan Sinzinger1, René Theska1
11th Seminar on Quantitative Microscopy (QM) and 7th Seminar on Nanoscale Calibration Standards and Methods, Dimensional and related measurements in the micro- and nanometre range, , Wroclaw, Poland
1Technische Universität Ilmenau, Department of Mechanical Engineering, Competence Centre „Nanopositioning and Nanomeasuring Machines“, 98684 Ilmenau, P.O. Box 10 05 65, Germany, 2IMMS Institut für Mikroelekronik- und Mechatronik-Systeme gemeinnützige GmbH (IMMS GmbH), Ehrenbergstraße 27, 98693 Ilmenau, Germany