Aktuelle Publikation
Nanopositioning and nanomeasuring technology - following the challenges of nanofabrication
E. Manske1.
T. Hausotte1.
R. Füßl1.
T. Fröhlich1.
M. Hofmann1.
I. Rangelow1.
J. Reger1.
C. Schäffel2.
S. Sinzinger1.
R. Theska1.
11th Seminar on Quantitative Microscopy (QM) and 7th Seminar on Nanoscale Calibration Standards and Methods, Dimensional and related measurements in the micro- and nanometre range, March 9 - 11, 2016, Wroclaw, Poland
1Competence Centre „Nanopositioning and Nanomeasuring Machines, Department of Mechanical Engineering, Technische Universität Ilmenau, 98684 Ilmenau, Germany.
2IMMS Institut für Mikroelektronik- und Mechatronik-Systeme gemeinnützige GmbH, D-98693 Ilmenau, Germany.