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1423.
Testing of mechanical properties of AlGaN thin films by Eigenmode detection on Microeletromechanical Systems (MEMS)
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1425.
Smart Home Platform for the Integration of Image Information in Daily Life Situations
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1426.
Residual stress measurements and mechanical properties of AlN thin films as ultra-sensitive materials for nanoelectromechanical systems
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1428.
Vernetzt, mobil, smart - Bausteine für CPS, Cyber-physikalische Systeme - Chancen für neue energieeffiziente Anwendungen