Current Publication
SMARTIEHS - a European Project for Parallel Testing of M(O)EMS
S. Michael1.
K. Gastinger2.
M. Kujawinska3.
U. Zeitner4.
J. Albero5.
S. Beer6.
R. Moosburger7.
M. Pizzi8.
Smart Systems Integration, 23.03.-24.03.2010, Como, Italy
1IMMS Institut für Mikroelektronik- und Mechatronik-Systeme gemeinnützige GmbH, Ilmenau.
2SINTEF IKT Optical measurement systems und data analysis, Trondheim, Norway.
3Warsaw Universtiy of Technology, IMiF, Warsaw, Poland.
4Fraunhofer IOF, Jena, Germany.
5CNRS FEMTO-ST, Besanco, France.
6CSEM SA, Zurich, Switzerland.
7Heliotis, Root Längenbold, Switzerland.
8Techfab s.r.l. Chivasso Torino, Italy.
Article