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Current Publication

Reducing the positioning uncertainty of a linear direct drive system with 200 mm travel range

S. Hesse1. T. Maass1. C. Schäffel1. M. Katzschmann1.

7th euspen International Conference, 20.-24. Mai 2007, Bremen

1IMMS Institut für Mikroelektronik- und Mechatronik-Systeme gemeinnützige GmbH, Ilmenau.
Poster presentation