Current Publication
Planar Magnetic 6D Levitating system with Compact Sensor
Christoph Schäffel1.
Michael Katzschmann1.
Hans-Ulrich Mohr1.
Rainer Glöß2.
Christian Rudolf2.
Christopher Mock2.
Carolin Walenda2.
R. Liang2.
27th Annual Meeting of the American Society for Precision Engineering (ASPE), 2012, San Diego, USA, 21.10.2012-26.10.2012
1IMMS Institut für Mikroelektronik- und Mechatronik-Systeme gemeinnützige GmbH, Ilmenau.
2Physik Instrumente (PI) GmbH & Co. KG, Karlsruhe, Germany.
Talk