Current Publication
An interferometric test station for massive parallel inspection of MEMS and MOEMS
M. Kujawinska2.
K. Gastinger1.
M. Jozwik2.
K. Haugholt1.
C. Schäffel3.
S. Beer4.
PHOTONICS LETTERS OF POLAND, VOL. 1 (2), (2009)
1SINTEF, Norway.
2Warsaw Univ. of Technology, Poland.
3IMMS Institut für Mikroelektronik- und Mechatronik-Systeme gemeinnützige GmbH, Ilmenau.
4Ctr. Suisse d'Electronique et de Microtechnique SA, Switzerland.
Article