Current Publication
AlGaN/GaN-heterostructures on (111) 3C-SiC/Si pseudo substrates for high frequency applications
K. Tonisch1.
W. Jatal1.
F. Niebelschuetz1.
H. Romanus2.
U. Baumann3.
F. Schwierz1.
J. Pezoldt1.
Thin Solid Films, Volume 520, Issue 1, 31 October 2011, S. 491-496. www.sciencedirect.com/science/article/pii/S0040609011013885
1Institute of Micro- and Nanotechnology MacroNano®, Ilmenau Technical University, P.O. Box 100565, 98684 Ilmenau, Germany.
2Center for Micro- and Nanotechnology, Ilmenau Technical University, P.O. Box 100565, 98684 Ilmenau, Germany.
3IMMS Institut für Mikroelektronik- und Mechatronik-Systeme gemeinnützige GmbH, Ehrenbergstr. 27, 98693 Ilmenau, Germany.
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