Presentation of research results at the DATE2015 conference in Grenoble, France. Photograph: Felix Salfelder.
Presentation of research results at the DATE2015 conference in Grenoble, France. Photograph: Felix Salfelder.

edaWorkshop 15

19.05.2015 – 21.05.2015

Lecture: "Design of Acceleration Sensors Using a Systematic MEMS-ASIC Design Flow"

Lecture, Thursday, May 21, 2015, 11:10 a.m., Technical Session: MEMS and Analog

"Design of Acceleration Sensors Using a Systematic MEMS-ASIC Design Flow"

Dominik Karolewski, Jenny Klaus, Raiko Pevgonen, Ralf Sommer

IMMS Institut für Mikroelektronik- und Mechatronik-Systeme gemeinnützige GmbH, Ilmenau, Germany