euspen 2022

Many high-tech applications like in semiconductor industry or metrology require positioning systems for controlled motions on nanometre level. We investigate nanoprecision drivesystems that allow direct driven multi-axis long-stroke motions.

As a functional enhancement to planar nanopositioning systems, vertical nanopositioners are being developed and investigated. These lifting and actuation units (LAU) are arranged in a threefold configuration to allow 3D vertical nanopositioning for translation in z and tilting in φ_x and φ_y.

The publication presents our joint investigations with Technische Universität Ilmenau. There, we focus on characteristics of such a threefold configuration and the simultaneous operation of the three LAU. Special focus lies on the behaviour of the mechanical system, the mutual influence of the different subsystems and the closed-loop performance with subnanometer position stability over the entire vertical travel range. Towards this end, an RMS servo error below 0.4 nm was achieved together with very low required actuator currents.

This confirms the choosen approach for vertical actuation. It marks an important intermediate step towards a full 6D drivesystem implementation as basis for our  research and development for nanofabrication.