981. Interferometric Test Station for Parallel Inspection of MEMS   C. Schäffel, S. Michael R. Paris A. Frank N. Zeike K. Gastinger M. Kujawinska U. Zeitner S. Beer Dresden: 5. Tagung 'Feinwerktechnische Konstruktion'. http://141.30.123.140/feinwerkwiki/index.php/5._Tagung_Feinwerktechnische_Konstruktion  

  982. Interferometric Test Station for Parallel Inspection of MEMS   C. Schäffel, S. Michael R. Paris A. Frank N. Zeike K. Gastinger M. Kujawinska U. Zeitner S. Beer. Dresden: 5. Tagung 'Feinwerktechnische Konstruktion'. 03.11.2011  

  983. Interferometrically controlled, scalable x-y planar positioning stage concept   Ilko Rahneberg, Enrico Langlotz Denis Dontsov Steffen Hesse Jaqueline Stauffenberg Eberhard Manske Special Interest Group Meeting: Micro/Nano Manufacturing, 17 – 18 November 2021, Virtual  

  985. Investigation of detectors for optical pick-up systems for DVD applications   J. Klein, St. Lange session of the conference SENOR 2003, Mai 2003  

  986. Investigation of distance measurement reproducibility for a long-range nanopositioning machine combined with a laser focus sensor   Davi Anders Brasil, Steffen Hesse Michael Katzschmann Ludwig Herzog Thomas Fröhlich Thomas Kissinger 20th International Conference on Precision Engineering (ICPE2024), Sendai, Japan, October 23-26, 2024  

  987. Investigation of thermal and non-linear effects on the performance of the power amplifier - BAW filter - chain in a LTE transmitter   Uwe Stehr, J. Stegner V. Chauhan V. Silva R. Weigel A. Hagelauer Astrid Frank Steffen Michael M. A. Hein 2018 IEEE International Ultrasonics Symposium, IUS 2018, 22-25 October 2018, Kobe, Japan  

  988. Investigations of metal systems in a silicon ceramic composite substrate for electrical and thermal contacts as well as associated mounting aspects   M. Fischer, T. Welker B. Leistritz S. Gropp C. Schäffel M. Hoffmann J. Müller Ceramic Interconnect and Ceramic Microsystems Technologies, Additional Conferences (Device Packaging, HiTEC, HiTEN, & CICMT): May 2016, Vol. 2016, No. CICMT, pp. 000107-000110, DOI: http://dx.doi.org/10.4071/2016CICMT-WA22  

  989. Investigations on the positioning accuracy of the Nano Fabrication Machine (NFM-100)   Jaqueline Stauffenberg, Ingo Ortlepp Ulrike Blumröder Denis Dontsov Christoph Schäffel Mathias Holz Ivo W. Rangelow Eberhard Manske tm - Technisches Messen. 2021, 88(9): 581-589. DOI: https://doi.org/10.1515/teme-2021-0079  

  990. Investigations on the Tracking Control and Performance of a Long Stroke Vertical Nanopositioning Drive   Alex S. Huaman, Stephan Gorges Michael Katzschmann Steffen Hesse Thomas Fröhlich Eberhard Manske Euspen (European Society for Precision Engineering and Nanotechnology) – 22nd International Conference & Exhibition, 30 May – 3 June 2022, Geneva, Switzerland