751. 2010 Jahresbericht | Fachartikel SFB622 (en/de)   2010 Jahresbericht | Fachartikel SFB622 (en/de) 15 3D PO­SITIONING SYSTEM IN THE RANGE OF ­NANOMETERS Collaborative Research Center 622 “NanoPositioning and NanoMeasuring Machines” IMMS had collaborated, in the part project A5, consiso, it is the aim of the operation of IMMS, to research Planar Air-guided Direct Drive System forces. The x-, y-position of the slider as well as the Minimization of Disturbances the basics of designing nanopositioning systems for A planar aerostatically guided direct drive system, rotation r z are measured by high-resolution plane Regarding absolute…  

  754. Dienstleistungen Industrielle Elektronik und Messtechnik   Dienstleistungen Industrielle Elektronik und Messtechnik Service Range Industrial Electronic and Measurement Technology RF on-wafer measurement Based on many years of experience in circuit design and measurement technology, IMMS designs and implements innovative methods for micro and nano technology. Our services include • Measurements at transistor level • Measurement of modules • Characterization of complex applications • Circuit design / PCB layout. en pm S vel o de SYS TEM in RF ne ss POWER ELECTRONICS on Reliability in application cti High-end semiconductor test…