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2186 Ergebnisse
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1574.
Operation and performance evaluation of vertical nanopositioners for 10 mm stroke in a 3D lift and tilt test setup
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1575.
Optical detected magnetic resonance (ODMR) of ASi-Sii defects: case of acceptor indium
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1576.
Optical, mechanical and electro-optical design of an interferometric test station for massive parallel inspection of MEMS and MOEMS