2008 Jahresbericht | Fachartikel SFB622 (de/en)
Planarmotorkonzept für die Positionierung mit Nanometerpräzision Planar Motor Concept for Positioning with Nanometer Precision Einleitung Introduction Das Erreichen von Unsicherheiten im Bereich weniger Nanometer in Verbindung mit einem Verfahrbereich von einigen 100 mm - das ist eine Zielstellung, die Forschergruppen weltweit beschäftigt. Positioning systems with uncertainties of just a few nanometers and travel ranges of 100 mm and higher - this is the ambition of many R&D institutes throughout the world. As a part of SFB 622, IMMS is…
2010 Jahresbericht | Fachartikel SFB622 (en/de)
15 3D POSITIONING SYSTEM IN THE RANGE OF NANOMETERS Collaborative Research Center 622 “NanoPositioning and NanoMeasuring Machines” IMMS had collaborated, in the part project A5, consiso, it is the aim of the operation of IMMS, to research Planar Air-guided Direct Drive System forces. The x-, y-position of the slider as well as the Minimization of Disturbances the basics of designing nanopositioning systems for A planar aerostatically guided direct drive system, rotation r z are measured by high-resolution plane Regarding absolute…
Bojan Dimitrijević,
Bojana Nikolić
Slavoljub Aleksić
Nebojša Raičević
Hannes Toepfer
Elena Chervakova
Tino Hutschenreuther
12th International Conference on Applied Electromagnetics, August 31- September 02, 2015, Niš, Serbia, ELEKTROTECHNICA & ELEKTRONICA E+E Vol. 50. No 9-10/2015, Pages 23-27, ISSN 0861-4717
Elena Chervakova,
Marco Götze
Tino Hutschenreuther
Hannes Toepfer
Bojana Nikolic
Bojan Dimitrijevic
12th International Conference on Applied Electromagnetics, August 31- September 02, 2015, Niš, Serbia, ELEKTROTECHNICA & ELEKTRONICA E+E Vol. 50. No 9-10/2015, Pages 2-6, ISSN 0861-4717
