1031. 2010 Jahresbericht | Fachartikel SMARTIEHS (en/de)   2010 Jahresbericht | Fachartikel SMARTIEHS (en/de) 15 Optimized Test of MEMS Hence, as an example, the whole conception of the nic control system on a substratum respectively on The fabrication processes of MEMS require a se- the components of the project partners. Another a chip. Mostly their size is only a few micrometers quence of test steps for the monitoring of quality subtask is the development of the regulation of the (example see figure 1). These tiny systems have un- and for the safeguarding of performance parame- scanning unit. But IMMS brings in already existing …  

  1032. 2008 Jahresbericht | Fachartikel SFB622 (de/en)   2008 Jahresbericht | Fachartikel SFB622 (de/en) Planarmotorkonzept für die Positionierung mit Nanometerpräzision Planar Motor Concept for Positioning with Nanometer Precision Einleitung Introduction Das Erreichen von Unsicherheiten im Bereich weniger Nanometer in Verbindung mit einem Verfahrbereich von einigen 100 mm - das ist eine Zielstellung, die Forschergruppen weltweit beschäftigt. Positioning systems with uncertainties of just a few nanometers and travel ranges of 100 mm and higher - this is the ambition of many R&D institutes throughout the world. As a part of SFB 622, IMMS is…  

  1033. 2010 Jahresbericht | Fachartikel SFB622 (en/de)   2010 Jahresbericht | Fachartikel SFB622 (en/de) 15 3D PO­SITIONING SYSTEM IN THE RANGE OF ­NANOMETERS Collaborative Research Center 622 “NanoPositioning and NanoMeasuring Machines” IMMS had collaborated, in the part project A5, consiso, it is the aim of the operation of IMMS, to research Planar Air-guided Direct Drive System forces. The x-, y-position of the slider as well as the Minimization of Disturbances the basics of designing nanopositioning systems for A planar aerostatically guided direct drive system, rotation r z are measured by high-resolution plane Regarding absolute…  

  1036. Dienstleistungen Industrielle Elektronik und Messtechnik   Dienstleistungen Industrielle Elektronik und Messtechnik Service Range Industrial Electronic and Measurement Technology RF on-wafer measurement Based on many years of experience in circuit design and measurement technology, IMMS designs and implements innovative methods for micro and nano technology. Our services include • Measurements at transistor level • Measurement of modules • Characterization of complex applications • Circuit design / PCB layout. en pm S vel o de SYS TEM in RF ne ss POWER ELECTRONICS on Reliability in application cti High-end semiconductor test…