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  564. Determination of yaw angle of mirror origin in a 6-DOF nanopositioning stage  
Davi Anders Brasil, Michael Katzschmann, Steffen Hesse, Ludwig Herzog, Thomas Kissinger, Thomas Fröhlich, Ilmenau, Germany 2026 International Scientific Symposium on World Interferometry Day 2026  
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  569. Development and validation of a simplified coil model for CFD simulation of a nano-positioning planar drive system  
Ina Naujokat, Ludwig Herzog, Steffen Hesse, Parastoo Salimitari, Cranfield University, United Kingdom 2025 Euspen Special Interest Conference: Precision & Performance 2025  
Suchergebnis 561 bis 570 von 2180