Annual Report 2012
A N N U A L R E P O RT 2012 Publishing Details Contents 4 6 8 Publisher Institut für Mikroelektronik- und MechatronikSysteme gemeinnützige GmbH* Ehrenbergstraße 27 D-98693 Ilmenau +49.3677.6955.00 Tel +49.3677.6955.15 Fax imms@imms.de http://www.imms.de Editing and Proof Reading Prof. Dr.-Ing. Ralf Sommer Dipl.-Ing. Hans-Joachim Kelm Dipl.-Hdl. Dipl.-Des. Beate Hövelmans Translation Susan Kubitz, www.QualityTranslations.de 10 11 Design, Photographs and Illustrations Dipl.-Hdl. Dipl.-Des. Beate Hövelmans 12 16 17 21 Typography and Information Graphics Dipl.-Hdl.…
2011 Jahresbericht | Fachartikel USENEMS-PRIMOS (en/de)
MEMS/NEMS – Simulation and Test Micro- and nanoelectromechanical systems (MEMS/ NEMS) mostly are structures with a size of only a few micrometers, consisting of sensors, actors and control electronics on a substrate or a chip. MEMS are increasingly used in places where miniaturizing and improved functionality are essential. They are )LJXUH an important foundation for innovation. MEMS trigger airbags, are used for stability control in vehic- Comparison les and as blood pressure sensors in intensive care of the Sizes of a Mite…
2011 Jahresbericht | Fachartikel SMARTHIES (en/de)
SMARTIEHS Sets New Standards for MEMS Tests on Wafer Level Micro-(Opto-)Electro-Mechanical Systems (M(O) EMS) detect the fall of a laptop to park the read head of the hard disk in time, control inkjet prin- Figure 1: On 8 inch wafers, an average of 10,000 structures is placed. It is the goal of the SMARTIEHS project to test these structures faster. Source: IMMS ting heads or warn in car tyres in case of a sudden pressure drop. Therefore, M(O)EMS are a vital dri- complex, as well as their reliability requirements. ving force of…
2011 Jahresbericht | Fachartikel Retina-Implantat (en/de)
ASIC Development and Test for a Retinal Implant cessor and Retina Stimulator. A camera integrated into spectacles records images of the environment, which are transfered by a Internal RF link, processor into stimulation signals for UHFWLᎦHU DQG EXᎥHU the optical nerve. An optical interface, reaching from the spectacles via the pupil into the inner part of Stimulator the eyeball, transfers the information to the Retina Stimulator. There, the data is handed over to the optical nerve. This way, the patient can learn to recognize…
Annual Report 2011
r A n n u a o p e rt 2 0 1 l IMMS I Annual Report 2011 I Future is now. 1 1 Imprint Publisher Institute for Microelectronic and Mechatronic Systems GmbH Ehrenbergstraße 27 D-98693 Ilmenau Tel. : +49.3677.6955.00 Fax : +49.3677.6955.15 E-Mail: imms@imms.de www: http://www.imms.de Editing and Proof Reading Prof. Dr.-Ing. Ralf Sommer Dipl.-Ing. Hans-Joachim Kelm Dipl.-Hdl. Dipl.-Des. Beate Hövelmans Dipl.-Ing. Anne Arlt Translation Claudia Koch Layout and Typesetting Manuel Mohr Dipl.-Hdl. Dipl.-Des. Beate Hövelmans Photos Dipl.-Hdl. Dipl.-Des. Beate…
2010 Jahresbericht | Fachartikel SMARTIEHS (en/de)
15 Optimized Test of MEMS Hence, as an example, the whole conception of the nic control system on a substratum respectively on The fabrication processes of MEMS require a se- the components of the project partners. Another a chip. Mostly their size is only a few micrometers quence of test steps for the monitoring of quality subtask is the development of the regulation of the (example see figure 1). These tiny systems have un- and for the safeguarding of performance parame- scanning unit. But IMMS brings in already existing …
2010 Jahresbericht | Fachartikel SFB622 (en/de)
15 3D POSITIONING SYSTEM IN THE RANGE OF NANOMETERS Collaborative Research Center 622 “NanoPositioning and NanoMeasuring Machines” IMMS had collaborated, in the part project A5, consiso, it is the aim of the operation of IMMS, to research Planar Air-guided Direct Drive System forces. The x-, y-position of the slider as well as the Minimization of Disturbances the basics of designing nanopositioning systems for A planar aerostatically guided direct drive system, rotation r z are measured by high-resolution plane Regarding absolute…
2010 Jahresbericht | Fachartikel Lichtsensoren (en/de)
15 all sensory input we use for orienting ourselves in our Photodiodes in Electronic Devices environment and for communicating with other hu- Light-based electronic sensors and communication man beings is received visually. Through our eyes, we systems require both light-emitting components, can sense the spatial distribution and temporal vari- such as LEDs or displays, as well as devices called ations of the intensity and color of the ambient light. photodiodes, which are capable of converting light From this stream of…
